TY  - BOOK
AU  - Giannuzzi,Lucille A.
AU  - Stevie,Fred A.
TI  - INTRODUCTION TO FOCUSED ION BEAMS
SN  - 0387231161
U1  - 621.38152 
PY  - 2005///
CY  - 
PB  - Springer Science+Business Media Inc., New York
KW  - Focused Ion Beams
KW  - Semiconductors
ER  -