TY  - BOOK
AU  - Allen,James J
TI  - MICRO ELECTRO MECHANICAL SYSTEM DESIGN
SN  - 0824758242
U1  - 621 
PY  - 2005///
CY  - 
PB  - Taylor & Francis, Boca Raton
KW  - Microelectromechanical Systems-Design And Construction
ER  -