TY  - BOOK
AU  - Mahalik,N. P.
TI  - MICROMANUFACTURING AND NANOTECHNOLOGY
SN  - 3540253777
U1  - 620.5 
PY  - 2006///
CY  - 
PB  - Springer-Verlag, Berlin
KW  - Nanotechnology
KW  - Micromachining
ER  -