621.381531  / N157 <br/>
Bucknall,David G. <br/>
       NANOLITHOGRAPHY AND PATTERNING TECHNIQUES IN MICROELECTRONICS 
 / 
 .-  Woodhead Publishing Ltd., Cambridge,  2005 
 .- xiv,409 . 
<br><u>ISBN:</u> 1855739313 
<br/><u>Subject Headings:</u> <br/>Molecular Electronics;<br/>Microlithography;<br/>Nanotechnology;
<br><U>Copy Details:</u><br> Acc. No.: <b>A153821</b>, Full Call No.: 621.381531 N157,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>