TY  - BOOK
AU  - Bucknall,David G.
TI  - NANOLITHOGRAPHY AND PATTERNING TECHNIQUES IN MICROELECTRONICS
SN  - 1855739313
U1  - 621.381531 
PY  - 2005///
CY  - 
PB  - Woodhead Publishing Ltd., Cambridge
KW  - Molecular Electronics
KW  - Microlithography
KW  - Nanotechnology
ER  -