TY  - BOOK
AU  - Bowen,D. Keith
AU  - Tanner,Brian K.
TI  - X-RAY METROLOGY IN SEMICONDUCTOR MANUFACTURING
SN  - 0849339286
U1  - 621.38152 
PY  - 2006///
CY  - 
PB  - Crc Press, Boca Raton
KW  - Semiconductors -- Design And Construction -- Quality Control
KW  - Integrated Circuits -- Measurement
KW  - Semiconductor Wafers -- Inspection
ER  -