TY - BOOK AU - Saliterman,Steven S. TI - FUNDAMENTALS OF BIOMEMS AND MEDICAL MICRODEVICES SN - 0819459771 U1 - 610.28 PY - 2006/// CY - PB - Spie-The International Soc. For Optical Engg., Washington KW - Nanotechnology KW - Biotechnology KW - Microelectromechanical Systems N1 - Includes Bibliographical References And Index ER -