TY  - BOOK
AU  - Banks,Danny
AU  - Faulkner,L. L.
TI  - MICROENGINEERING, MEMS, AND INTERFACING
SN  - 0824723058
U1  - 621 
PY  - 2006///
CY  - 
PB  - Crc Press, Boca Raton
KW  - Microelectromechanical Systems
ER  -