TY  - BOOK
AU  - Korvink,Jan G.
AU  - Paul,Oliver
TI  - MEMS: A PRACTICAL GUIDE TO DESIGN, ANALYSIS AND APPLICATIONS
SN  - 3540211179
U1  - 621 
PY  - 2006///
CY  - 
PB  - William Andrew, Norwich, Ny
KW  - Microelectromechanical Systems
ER  -