TY  - BOOK
AU  - Leondes,Cornelius T.
TI  - MEMS/NEMS
SN  - 0387245200
U1  - 620.5 
PY  - 2006///
CY  - 
PB  - Springer Science+Business Media Inc., New York
KW  - Microelectromechanical Systems -- Design And Construction
KW  - Nanotechnology
N1  - Contents : V. 1. Design Methods -- V. 2. Fabrication Techniques -- V. 3. Manufacturing Methods -- V. 4. Sensors And Actuators -- V. 5. Medical Applications And Moems
ER  -