MEMS/NEMS - Leondes,Cornelius T. (Springer Science+Business Media Inc., New York, 2006)
Contents : V. 1. Design Methods -- V. 2. Fabrication Techniques -- V. 3. Manufacturing Methods -- V. 4. Sensors And Actuators -- V. 5. Medical Applications And Moems
Keywords: Microelectromechanical Systems -- Design And Construction; Nanotechnology