TY  - BOOK
AU  - Christophorou,Loucas G.
AU  - Olthoff,James K.
TI  - FUNDAMENTAL ELECTRON INTERACTIONS WITH PLASMA PROCESSING GASES
SN  - 0306480379
U1  - 539.757 
PY  - 2004///
CY  - 
PB  - Kluwer Academic / Plenum Publishers, New York
KW  - Electron-Molecule Collisions
KW  - Plasma (Ionized Gases)
ER  -