TY  - BOOK
AU  - Chen,Francis F.,Chang,Jane P.
TI  - LECTURE NOTES ON PRINCIPLES OF PLASMA PROCESSING
SN  - 0306474972
U1  - 621.044 
PY  - 2003///
CY  - 
PB  - Kluwer Academic / Plenum Publishers,New York
KW  - Plasma Engineering
KW  - Plasma Chemistry
KW  - Plasma Dynamics
N1  - With Cd-Rom
ER  -