TY - BOOK AU - Doering,Robert AU - Nish,Yoshio TI - HANDBOOK OF SEMICONDUCTOR MANUFACTURING TECHNOLOGY SN - 9781574446753 U1 - 621.38152 PY - 2008/// CY - PB - Crc Press,Boca Raton KW - Semiconductors -- Design And Construction -- Handbooks, Manuals, Etc KW - Semiconductor Industry -- Handbooks, Manuals, Etc N1 - "With Cd-Rpm" ER -