TY  - BOOK
AU  - Baklanov,Mikhail,Green,Martin
AU  - Maex,Karen
TI  - DIELECTRIC FILMS FOR ADVANCED MICROELECTRONICS
SN  - 9780470013601
U1  - 621.381 
PY  - 2007///
CY  - 
PB  - John Wiley And Sons Ltd., Chichester
KW  - Dielectric Flims
KW  - Microelectronics -- Materials
ER  -