TY  - BOOK
AU  - Middleman,Stanley
AU  - Hochberg,Arthur K.
TI  - PROCESS ENGINEERING ANALYSIS IN SEMICONDUCTOR DEVICE FABRICATION
SN  - 0071127445
U1  - 621.38152 
PY  - 1993///
CY  - 
PB  - Mcgraw-Hill, New York
KW  - Semiconductors - Design And Construction
N1  - Includes Bibliographical References And Index
ER  -