TY  - BOOK
AU  - Middleman, Stanley
AU  - Hochberg, Arthur K.
TI  - Process engineering analysis in semiconductor device fabrication
SN  - 0071127445
U1  - 621.38152 
PY  - 1993///
CY  -  New York
PB  - Mcgraw-Hill
KW  - Semiconductors
KW  - Design and construction
N1  - Includes bibliographical references and index
ER  -