TY  - BOOK
AU  - Wetzig,Klaus
AU  - Schneider,Claus M.
TI  - METAL BASED THIN FILMS FOR ELECTRONICS
SN  - 3527406506
U1  - 621.38152 
PY  - 2006///
CY  - 
PB  - Wiley-Vch Verlag Gmbh & Co. Kgaa, Weinheim
KW  - Thin Films
KW  - Metallic Films
KW  - Electronics -- Materials
ER  -