TY  - BOOK
AU  - Ostrikov,Kostya (Ken)
AU  - Xu,Shuyan
TI  - PLASMA-AIDED NANOFABRICATION
SN  - 9783527406333
U1  - 620.5 
PY  - 2007///
CY  - 
PB  - Wiley-Vch Verlag Gmbh & Co. Kgaa, Weinheim
KW  - Nanostructured Materials
KW  - Plasma Engineering
KW  - Low Temperature Plasma
ER  -