TY  - BOOK
AU  - Jackson,Mark J.
TI  - MICRO AND NANOMANUFACTURING
SN  - 0387258744
U1  - 620.5 
PY  - 2007///
CY  - 
PB  - Springer Science+Business Media Inc., New York
KW  - Microfabrication
KW  - Nanotechnology
ER  -