TY - BOOK AU - Varadan,Vijay K.,Vinoy,K. J. AU - Gopalakrishnan,S. TI - SMART MATERIAL SYSTEMS AND MEMS SN - 0470093617 U1 - 621.381 PY - 2006/// CY - PB - John Wiley, Chichester KW - Microelectro Mechanical Systems KW - Smart Materials ER -