TY  - BOOK
AU  - Geng,Hwaiyu
TI  - SEMICONDUCTOR MANUFACTURING HANDBOOK
SN  - 0071445595
U1  - 621.38152 
PY  - 2005///
CY  - 
PB  - Mcgraw-Hill, New York
KW  - Semiconductor -- Design And Construction -- Handbooks, Manuals, Etc
KW  - Integrated Ciruits -- Design And Construction -- Handbooks, Manuals, Etc
ER  -