TY  - BOOK
AU  - May,Gary S.,Spanos,Costas J.
TI  - FUNDAMENTALS OF SEMICONDUCTOR MANUFACTURING AND PROCESS CONTROL
SN  - 0471784060
U1  - 621.38152 
PY  - 2006///
CY  - 
PB  - Wiley-Liss, Inc.,Hoboken, N. J.
KW  - Semiconductors-Design And Construction
KW  - Integrated Circuits-Design And Construction
KW  - Process Control-Statistical Methods
ER  -