TY  - BOOK
AU  - 
AU  - Hans Zappe, Ed.
TI  - Comprehensive microsystems
SN  - 978044452194
U1  - 620.004 
PY  - 2008///
CY  - Amsterdam
PB  - Elsevier
KW  - Microelectronics2.Optical Detectors -- Industrial Applications3.Microelectromechanical
N1  - Contents: V.1.Materials Fabrication And System Design - V.2.Actuation Mechanism Physical Sensing Chemical And Biological Systems- V.3.Optical Systems Industrial Applications Emerging Topics
ER  -