TY - BOOK AU - Jha, A. R. TI - MEMS and nanotechnology-based sensors and devices for communications, medical and aerospace applications SN - 9780849380693 U1 - 620.5 PY - 2008/// CY - Boca Raton PB - Crc Press KW - Microelectromechanical Systems KW - Detectors KW - Telecommunication -- Equipment And Supplies ER -