TY  - BOOK
AU  - Hsu, Tai-Ran
TI  - MEMS and  microsystems: design, manufacture and nanoscale engineering
SN  - 9780470083017
U1  - 621.381 
PY  - 2008///
CY  - New Jersey
PB  - John Wiley
KW  - Microelectronics
ER  -