621.38152 / R22
Reactive sputter deposition
/ edited by D. Depla
.- Berlin: Springer, 2008
.- xviii, 570p. .
.- ( Springer Series In Materials Science
ISBN: 9783540766629
Subject Headings:
Cathode Sputtering (Plating Process);
Author Added Entry:
Mahieu, S.,Ed.;
Copy Details:
Acc. No.: A161826, Full Call No.: 621.38152 R22, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
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