TY  - BOOK
AU  - 
AU  - Kockman, Norbert,Ed.
TI  - Micro process engineering: fundamentals, devices, fabrication, and applications
SN  - 9783527312467
U1  - 670.42 
PY  - 2006///
CY  - Weinheim
PB  - Wiley-Vch
KW  - Product Engineering
ER  -