TY  - BOOK
AU  - 
AU  - Frangi, Attilio, Ed.
TI  - Advances in multiphysics simulation and experimental testing of MEMS
SN  - 9781860948626
U1  - 621.3815 
PY  - 2008///
CY  - London
PB  - Imperial College Press
KW  - Microelectromechanical systems
ER  -