TY  - BOOK
AU  - 
AU  - Tan, Chuan Seng, Ed.
TI  - Wafer level 3-D ICs process technology
SN  - 9780387765327
U1  - 621.38152 
PY  - 2008///
CY  - New York
PB  - Springer
KW  - Optoelectronic devices
N1  - Forwarded By Scott List; Includes bibliographical references and index
ER  -