TY  - BOOK
AU  - Liu, Ai-Qun 
AU  - Zhang, Xuming
TI  - Photonic MEMS devices: design, fabrication and control
SN  - 9781420045680 (hb.)
U1  - 621.381 
PY  - 2009///
CY  - Boca Raton
PB  - Crc Press
KW  - Microelectromechanical systems
ER  -