TY  - BOOK
AU  - 
AU  - Fleetwood, Daniel M., Ed.
TI  - Defects in microelectronic materials and devices
SN  - 9781420043761
U1  - 621.381 
PY  - 2009///
CY  - Boca Raton
PB  - Crc Press
KW  - Microelectronics - Materials - Testing
KW  - Integrated circuits - Defects
ER  -