TY  - BOOK
AU  - 
AU  - Saile, Volker, Ed.
TI  - LIGA and its applications
SN  - 9783527316984
U1  - 621.381 
PY  - 2009///
CY  - Weinheim
PB  - Wiley-Vch Verlag
KW  - Microelectromechanical systems
ER  -