TY  - BOOK
AU  - Paik, Ungyu
AU  - Park, Jea-Gun
TI  - Nanoparticle engineering for chemical-mechanical planarization: fabrication of next-generation nanodevices
SN  - 9781420059113
U1  - 621.38152 
PY  - 2009///
CY  - Boca Raton
PB  - Crc Press
KW  - Chemical mechanical planarization
N1  - Includes bibliographical references and index
ER  -