TY  - BOOK
AU  - 
AU  - Bakir, Muhannan S., Ed.
TI  - Integrated interconnect technologies for 3D nanoelectronic systems
SN  - 9781596932463
U1  - 621.381 
PY  - 2009///
CY  - Boston
PB  - Artech House
KW  - Interconnects (Integrated Circuit Technology)
ER  -