TY - BOOK AU - AU - Lohe, Detlef, Ed. TI - Microengineering of metals and ceramics SN - 9783527314935 U1 - 620.14 PY - 2005/// CY - Weinheim PB - Wiley-Vch KW - Micromechanics N1 - Includes bibliographical references and indexes; Contents: pt.2.-Special replication techniques, automation, and properties ER -