TY  - BOOK
AU  - 
AU  - Yao, Takafumi, Ed.
TI  - Oxide and nitride semiconductors: processing, properties, and applications
SN  - 9783540888468
U1  - 621.39732 
PY  - 2009///
CY  - Berlin
PB  - Springer
KW  - Metal oxide semiconductors
N1  - With 370 Figures; Includes bibliographical references and index
ER  -