TY  - BOOK
AU  - Mattox, Donald M.
TI  - Handbook of physical vapor deposition (PVD) processing
SN  - 9780815520375
U1  - 671.735 
PY  - 2010///
CY  - Amsterdam
PB  - Elsevier
KW  - Vapor-plating -- Handbooks, manuals, etc
ER  -