TY  - BOOK
AU  - 
AU  - Lindroos, Veikko
TI  - Handbook of silicon based MEMS materials and technologies
SN  - 9780815515944
U1  - 621.38152 
PY  - 2010///
CY  - Amsterdam
PB  - Elsevier
KW  - Microelectronical systems -- Materials
ER  -