TY  - BOOK
AU  - Reinhardt, Karen A.
AU  - Reidy, Richard F.
TI  - Handbook of cleaning for semiconductor manufacturing: fundamentals and applications
SN  - 9780470625958
U1  - 621.38152 
PY  - 2011///
CY  - New Jersey
PB  - John Wiley & Sons
KW  - Semiconductors
KW  - Optoelectronics
ER  -