TY  - BOOK
AU  - 
AU  - Lasagni, Fernando A., Ed.
TI  - Fabrication and characterization in the micro-nano range: new trends for two and three dimensional structures
SN  - 9783642177811
U1  - 621.3815 
PY  - 2011///
CY  - Berlin
PB  - Springer
KW  - Microtechnology
ER  -