TY  - BOOK
AU  - 
AU  - Baudrant, Annie, Ed.
TI  - Silicon technologies: ion implantation and thermal treatment
SN  - 9781848212312
U1  - 621.38152 
PY  - 2011///
CY  - New Jersey
PB  - John Wiley & Sons
KW  - Semiconductor doping
ER  -