TY  - BOOK
AU  - Madou, Marc J.
TI  - Fundamentals of microfabrication and nanotechnology [3 vol.] [3rd ed.]
SN  - 9780849331800
U1  - 621.38152 
PY  - 2012///
CY  - Boca Raton
PB  - CRC Press
KW  - Microelectronics -- Design and construction
N1  - Contents: v.1 -- Solid-state physics, fluidics, and analytical techniques in micro and nanotechnology. v.2 -- Manufacturing techniques for microfabrication and nanotechnology. v.3 -- From MEMS to Bio-MEMS and Bio-MEMS
ER  -