621.38152  / D731c <br/>
Dorey, Robert <br/>
       Ceramic thick films for MEMS and microdevices 
 / Robert Dorey 
 .- Amsterdam: Elsevier,  2012 
 .- xviii, 191p . 
.- ( Micro And Nano Technology Series     
<br><u>ISBN:</u> 9781437778175 
<br/><u>Subject Headings:</u> <br/>Ceramic coating.;
<br><U>Copy Details:</u><br> Acc. No.: <b>A173368</b>, Full Call No.: 621.38152 D731c,   Item type:  Books , Location: COMPACT STORAGE (BASEMENT), <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>