TY  - BOOK
AU  - Adams, Thomas M.
AU  - Layton, Richard A.
TI  - Introductory MEMS: fabrication and applications
SN  - 9780387095103
U1  - 621.381 
PY  - 2010///
CY  - New York
PB  - Springer Science+Business Media
KW  - Microelectromechanical systems
KW  - Electronic appratus and appliances
KW  - Transducers
KW  - MEMS
ER  -