TY  - BOOK
AU  - Jaeger, Richard C. 
TI  - Introduction to microelectronic fabrication
SN  - 9780201444940
U1  - 621.395 
PY  - 2001///
CY  - New Jersey
PB  - Prentice Hall
KW  - Intergrated circuits -- Very large scale integration -- Design and construction -- Textbook
ER  -