TY  - BOOK
AU  - Wolf, Stanley
AU  - Taubner, Richard N.
TI  - Silicon processing for  VLSI ERA [v.1]
U1  - 621.38173 
PY  - 1986///
CY  - California
PB  - Lattice Press
KW  - Silicon
KW  - Integrated circuits -- Very large scale integration
KW  - Semi conductors -- Etching
N1  - Contents: v.1. Process technology
ER  -