TY  - BOOK
AU  - Wolf, Stanley
TI  - Silicon processing for the VLSI ERA [v.2]
U1  - 621.38173 
PY  - 2000///
CY  - California
PB  - Lattice Press
KW  - Silicon
KW  - Integrated circuits -- Very large scale information
KW  - Semiconductors -- Etching
N1  - Contents:v.1. Process integration
ER  -