TY  - BOOK
AU  - 
AU  - Gusev, Evgeni, Ed.
TI  - Advanced materials and technologies for micro/nano-devices, sensors and actuators
SN  - 9789048138050
U1  - 621.381 
PY  - 2010///
CY  - Berlin
PB  - Springer
KW  - Microelectro mechanical systems -- Design and Construction -- Congresses
KW  - Nanotechnology -- Congresses
ER  -