TY  - BOOK
AU  - Rebohle,  Lars 
AU  - Skorupa, Wolfgang.
TI  - Rare-earth implanted MOS devices for silicon photonics: microstructural, electrical and optoelectronic properties
SN  - 9783642144462
U1  - 621.39732 
PY  - 2010///
CY  - Berlin
PB  - Springer
KW  - Metal oxide semiconductors
ER  -